CU7002 MEMS AND NEM

CU7002 MEMS AND NEMS

UNIT I OVERVIEW AND INTRODUCTION

New trends in Engineering and Science: Micro and Nanoscale systems Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems, Applications of Micro and Nanoelectromechanical systems, Microelectromechanical systems, devices and structures Definitions, Materials for MEMS: Silicon, silicon compounds, polymers, metals 

UNIT II MEMS FABRICATION TECHNOLOGIES

Microsystem fabrication processes: Photolithography, Ion Implantation, Diffusion, Oxidation. Thin film depositions: LPCVD, Sputtering, Evaporation, Electroplating; Etching techniques: Dry and wet etching, electrochemical etching; Micromachining: Bulk Micromachining, Surface Micromachining, High AspectRatio (LIGA and LIGA-like) Technology; Packaging: Microsystems packaging, Essential packaging technologies, Selection of packaging materials 

UNIT III MICRO SENSORS

MEMS Sensors: Design of Acoustic wave sensors, resonant sensor, Vibratory gyroscope, Capacitive and Piezo Resistive Pressure sensors- engineering mechanics behind these Microsensors. Case study: Piezo-resistive pressure sensor 

UNIT IV MICRO ACTUATORS

Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys, Actuation using piezoelectric crystals, Actuation using Electrostatic forces (Parallel plate, Torsion bar, Comb drive actuators), Micromechanical Motors and pumps. Case study: Comb drive actuators 

UNIT V NANOSYSTEMS AND QUANTUM MECHANICS

Atomic Structures and Quantum Mechanics, Molecular and Nanostructure Dynamics: Shrodinger Equation and Wavefunction Theory, Density Functional Theory, Nanostructures and Molecular Dynamics, Electromagnetic Fields and their quantization, Molecular Wires and Molecular Circuits 

REFERENCES: 

1. Marc Madou, “Fundamentals of Microfabrication”, CRC press 1997. 

2. Stephen D. Senturia,” Micro system Design”, Kluwer Academic Publishers,2001 

3. Tai Ran Hsu ,”MEMS and Microsystems Design and Manufacture” ,Tata Mcraw Hill, 2002. 

4. Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006, 

5. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures” CRC Press, 2002